Title :
Analysis of performance/variability trade-off in Macaroni-type 3-D NAND memory
Author :
Congedo, G. ; Arreghini, A. ; Liu, L. ; Capogreco, E. ; Lisoni, J.G. ; Huet, Karim ; Toque-Tresonne, Ines ; Van Aerde, S. ; Toledano-Luque, Maria ; Tan, C.-L. ; Van den bosch, G. ; Van Houdt, J.
Author_Institution :
Imec, Leuven, Belgium
Abstract :
Full channel and Macaroni-type 3-D SONOS memories are thoroughly compared. Macaroni channel provides easier device controllability, resulting in tighter distributions of all electrical characteristics, at the expense of lower channel conduction. Next to this clear trade-off, memory window is also degraded. Improving channel material quality is the way to alleviate the trade-off, as demonstrated by Laser Thermal Anneal treatment of Macaroni channel.
Keywords :
NAND circuits; storage management chips; three-dimensional integrated circuits; Macaroni-type 3D SONOS NAND memory; channel material quality; electrical characteristics; full channel 3D SONOS memories; laser thermal anneal treatment; lower channel conduction; memory window; performance-variability trade-off analysis; Annealing; Controllability; Electric variables; Junctions; Performance evaluation; Silicon; Statistical distributions; 3-D NAND; 3-D SONOS; BiCS Macaroni; Macaroni Channel Thickness;
Conference_Titel :
Memory Workshop (IMW), 2014 IEEE 6th International
Conference_Location :
Taipei
Print_ISBN :
978-1-4799-3594-9
DOI :
10.1109/IMW.2014.6849381
