Title :
Development of polymer-based artificial haircell using surface micromachining and 3D assembly
Author :
Chen, J. ; Engel, J. ; Chang Liu
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Abstract :
We report the development of an artificial haircell (AHC) fabricated using polymer surface micromachining and efficient 3D assembly. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design and fabrication process are discussed in the paper. Response to static deflection and airflow is also discussed.
Keywords :
Permalloy; aluminium; chromium alloys; gold; mechanoception; micromachining; nickel alloys; polymers; strain gauges; 3D assembly; AlNiCrCrAuFeNi; airflow; biological hair cells; polymer surface micromachining; polymer-based artificial haircell; static deflection; versatile mechanoreceptor; Assembly; Capacitive sensors; Fluid flow measurement; Hair; Micromachining; Polymer films; Robustness; Silicon; Substrates; Switches;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1216945
