Simulating nonlinear dynamics and chaos in a MEMS cantilever using poincare mapping

Author

Liu, S. ; Davidson, A. ; Lin, Q.

Author_Institution

Dept. of Mech. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA

Volume

2

fYear

2003

Firstpage

1092

Abstract

We have used Poincare mapping to find and characterize nonlinear dynamics and chaos in a periodically forced, electrostatically actuated MEMS cantilever intended for a probe-based data storage chip. The results show significant chaotic regions in the excitation parameter space that would not be found with standard Simulink-type simulations for both open and closed loop control of the cantilever. For one case the stable operation range is reduced by 25% because of a chaotic response. We have also found a region of bi-stability for the closed loop at low gain.

Keywords

Poincare mapping; chaos; closed loop systems; electrostatic actuators; micromechanical devices; open loop systems; chaotic region; chaotic response; closed loop control; electrostatically actuated MEMS cantilever; excitation parameter space; nonlinear chaos; nonlinear dynamics simulation; open loop control; periodically forced MEMS cantilever; poincare mapping; probe-based data storage chip; standard Simulink-type simulation; Casimir effect; Chaos; Damping; Electrostatics; Micromechanical devices; Nanoelectromechanical systems; Nonlinear dynamical systems; Nonlinear equations; Open loop systems; Servosystems;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1216959

Filename

1216959