/spl alpha/-line method for measuring the stability domain and pull-in hyper-surface of electrostatic actuators with multiple voltage sources

The pull-in state of electrostatic actuators that are driven by a single varying voltage is the equilibrium state for which the applied voltage is maximal. In contrast, electrostatic actuators driven by multiple voltage sources have an infinite number of critical states that constitute the pull-in hyper-surface. This work reports on a novel methodology for experimental characterization of the electromechanical response, and specifically of the pull-in hyper-surface, of electrostatic actuators driven by multiple voltages. This methodology is demonstrated on several fabricated devices.