Title :
Coupled-domain nonlinear macromodels and pull-in characteristics with electro-thermal effect
Author :
Szu-Yuan Cheng ; Che-Chia Yu ; Yang, Y.-J.
Author_Institution :
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
In this paper, we describe an efficient coupled-domain nonlinear macromodeling method for microsystems, and present the study of electro-thermal effects on the pull-in characteristic for a fixed-fixed beam by using this approach. The macromodeling method applies both the Karhunen-Loeve/Galerkin technique and the Arnoldi technique. The compact models generated by these two techniques are successfully integrated and tested. The application of the macromodels are demonstrated and discussed. Experimental verification for the simulated results is also provided.
Keywords :
Galerkin method; Karhunen-Loeve transforms; micromechanical devices; thermoelectricity; Arnoldi technique; Karhunen-Loeve-Galerkin technique; MEMS; coupled domain nonlinear macromodels; electro-thermal effect; fixed-fixed beam; microsystems; pull in characteristics; Couplings; Damping; Eigenvalues and eigenfunctions; Equations; Mechanical engineering; Microelectromechanical devices; Micromechanical devices; Nonlinear systems; Reduced order systems; Shape;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1216962
