Coupled-domain nonlinear macromodels and pull-in characteristics with electro-thermal effect

Author

Szu-Yuan Cheng ; Che-Chia Yu ; Yang, Y.-J.

Author_Institution

Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan

Volume

2

fYear

2003

Firstpage

1104

Abstract

In this paper, we describe an efficient coupled-domain nonlinear macromodeling method for microsystems, and present the study of electro-thermal effects on the pull-in characteristic for a fixed-fixed beam by using this approach. The macromodeling method applies both the Karhunen-Loeve/Galerkin technique and the Arnoldi technique. The compact models generated by these two techniques are successfully integrated and tested. The application of the macromodels are demonstrated and discussed. Experimental verification for the simulated results is also provided.

Keywords

Galerkin method; Karhunen-Loeve transforms; micromechanical devices; thermoelectricity; Arnoldi technique; Karhunen-Loeve-Galerkin technique; MEMS; coupled domain nonlinear macromodels; electro-thermal effect; fixed-fixed beam; microsystems; pull in characteristics; Couplings; Damping; Eigenvalues and eigenfunctions; Equations; Mechanical engineering; Microelectromechanical devices; Micromechanical devices; Nonlinear systems; Reduced order systems; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1216962

Filename

1216962