Title :
An investigation of stiction in poly-SiGe micromirror
Author :
Ling, F.Z. ; De Coster, J. ; Beernaert, R. ; Witvrouw, A. ; Celis, J.-P. ; De Wolf, I.
Author_Institution :
Imec, Leuven, Belgium
Abstract :
Permanent or temporary stiction remains one of the most critical reliability concerns for micro-electro-mechanical systems (MEMS). In this paper, we present an investigation of stiction of standard poly-SiGe MEMS. This is done by analyzing the hysteresis in the displacement-versus-voltage characteristics of electrostatically actuated micromirrors. The width of the “pull-in window” is used as an indication of the amount of mirror-to-surface stiction. Differences in the pull-out voltage of micromirrors within an array indicate varying levels of stiction from mirror to mirror. A FDTS self-assembled monolayer (SAM) is applied to reduce this in-use stiction. Analytical and finite element methods are used to quantify the magnitude of stiction.
Keywords :
Ge-Si alloys; finite element analysis; integrated optics; micromirrors; monolayers; reliability; self-assembly; semiconductor materials; stiction; FDTS self-assembled monolayer; MEMS; SAM; SiGe; displacement-voltage characteristics; electrostatically actuated micromirrors; finite element methods; microelectromechanical systems; mirror-surface stiction; polymicromirror; pull-in window width; pull-out voltage; reliability; Adhesives; Electrodes; Finite element methods; Force; Micromechanical devices; Micromirrors;
Conference_Titel :
Electronic Components and Technology Conference (ECTC), 2011 IEEE 61st
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-61284-497-8
Electronic_ISBN :
0569-5503
DOI :
10.1109/ECTC.2011.5898507
