Title :
Prototype of the multi-pixel X-ray microcalorimeter
Author :
Kudo, H. ; Nakamura, T. ; Arakawa, T. ; Ohtsuka, S. ; Izumi, T. ; Shoji, S. ; Sato, H. ; Kobayashi, H. ; Mori, K. ; Homma, T. ; Osaka, T. ; Mitsuda, K. ; Yamasaki, N.Y. ; Fujimoto, R. ; Iyomoto, N. ; Oshima, T. ; Futamoto, K. ; Takei, Y. ; Ichitsubo, T. ;
Author_Institution :
Waseda Univ., Tokyo, Japan
Abstract :
An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2/spl times/2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called ´mushroom-shaped´ X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.
Keywords :
calorimeters; electrodeposition; photon counting; prototypes; tin; Bi absorber; Sn; Sn micro absorber; X-ray spectrometer; electrodeposition process; microcalorimeter array; multi pixel X-ray microcalorimeter; mushroom shaped X-ray micro absorber; photon counting; prototype; Bismuth; Energy resolution; Gratings; High-resolution imaging; Optical imaging; Prototypes; Spectroscopy; Testing; Tin; X-ray imaging;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1216963
