Title :
Harmonic cantilevers for nanomechanical sensing of elastic properties
Author :
Sahin, Ozge ; Yaralioglu, G. ; Grow, R. ; Zappe, S.F. ; Atalar, A. ; Quate, C. ; Solgaard, O.
Author_Institution :
E.L. Ginzton Lab., Stanford Univ., CA, USA
Abstract :
We present a micromachined scanning probe cantilever, in which a specific higher order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have demonstrated that such cantilevers enable sensing of nonlinear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy.
Keywords :
atomic force microscopy; elasticity; microsensors; elastic properties; flexural mode; harmonic cantilever; mechanical properties; micromachined scanning probe cantilever; nanomechanical sensing; nonlinear mechanical interactions; resonance frequency; tapping mode atomic force microscopy; Atomic force microscopy; Elasticity; Mechanical factors; Nanobioscience; Optical imaging; Probes; Resonance; Resonant frequency; Surface topography; Vibrations;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1216967
