III-V/Ge CMOS technologies on Si platform

III-V/Ge CMOS on Si platform, realized by heterogeneous integration, is expected to provide a variety of applications from high speed logic CMOS to versatile SoC chips, where various functional devices can be co-integrated. Among them, we are currently pursuing high speed/low power logic CMOS using III-V/Ge channels. While many critical issues have been well recognized for them, we present possible solutions to break through these difficulties in this presentation.