Title :
New performance bounds for semiconductor manufacturing plants: batch tools and setups
Author :
Morrison, James R. ; Kumar, P.R.
Author_Institution :
Illinois Univ., Champaign, IL, USA
fDate :
6/21/1905 12:00:00 AM
Abstract :
The state space approach to obtaining performance bounds via the average cost inequality allows for the incorporation of model elements such as batch tools and setup modes. We demonstrate with an example how one may construct linear programs to obtain performance bounds for queueing network models of semiconductor manufacturing plants
Keywords :
Markov processes; batch processing (industrial); integrated circuit manufacture; linear programming; matrix algebra; probability; queueing theory; average cost inequality; batch tools; performance bounds; queueing network models; semiconductor manufacturing plants; setup modes; Conductors; Contracts; Cost function; Job shop scheduling; Linear programming; Probability distribution; Semiconductor device manufacture; Semiconductor device modeling; State-space methods; Virtual manufacturing;
Conference_Titel :
Decision and Control, 1999. Proceedings of the 38th IEEE Conference on
Conference_Location :
Phoenix, AZ
Print_ISBN :
0-7803-5250-5
DOI :
10.1109/CDC.1999.830140
