DocumentCode
1727250
Title
CAD For Microelectromechanical Systems
Author
Senturia, Stephen D.
Author_Institution
Microsystems Technology Laboratories, Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology
Volume
2
fYear
1995
Firstpage
5
Lastpage
8
Keywords
Circuit simulation; Circuit testing; Computational modeling; Context modeling; Microelectromechanical systems; Micromechanical devices; Numerical simulation; Process design; Solid modeling; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721697
Filename
721697
Link To Document