Title :
Energy resolved emission microscopy
Author_Institution :
Adv. Micro Devices, Austin, TX, USA
Abstract :
The assembly and test of a high-resolution photon emission microscopy system incorporating instrument response corrected spectroscopy of electroluminescence for IC failure analysis and reliability characterization are presented. The primary purpose of the system is to provide low-cost, high-resolution, high-sensitivity emission microscopy capability to a campus lab with a wide variety of users. However, recent investigations in the area of spectral analysis suggest that the instrument response corrected spectra generated by the system may be utilized in providing accurate estimations of hot carrier energy distributions and device lifetimes, as well as in providing consistent information concerning failure modes and mechanisms.<>
Keywords :
circuit reliability; electroluminescence; failure analysis; integrated circuit testing; optical microscopy; spectral analysis; IC failure analysis; device lifetimes; electroluminescence; failure modes; hot carrier energy distributions; instrument response corrected spectroscopy; photon emission microscopy system; reliability characterization; spectral analysis; Assembly systems; Electroluminescent devices; Energy resolution; Failure analysis; Instruments; Integrated circuit testing; Microscopy; Photonic integrated circuits; Spectroscopy; System testing;
Conference_Titel :
Reliability Physics Symposium, 1993. 31st Annual Proceedings., International
Conference_Location :
Atlanta, GA, USA
Print_ISBN :
0-7803-0782-8
DOI :
10.1109/RELPHY.1993.283327
