Energy resolved emission microscopy

Author

Bruce, V.J.

Author_Institution

Adv. Micro Devices, Austin, TX, USA

fYear

1993

Firstpage

178

Lastpage

183

Abstract

The assembly and test of a high-resolution photon emission microscopy system incorporating instrument response corrected spectroscopy of electroluminescence for IC failure analysis and reliability characterization are presented. The primary purpose of the system is to provide low-cost, high-resolution, high-sensitivity emission microscopy capability to a campus lab with a wide variety of users. However, recent investigations in the area of spectral analysis suggest that the instrument response corrected spectra generated by the system may be utilized in providing accurate estimations of hot carrier energy distributions and device lifetimes, as well as in providing consistent information concerning failure modes and mechanisms.<>

Keywords

circuit reliability; electroluminescence; failure analysis; integrated circuit testing; optical microscopy; spectral analysis; IC failure analysis; device lifetimes; electroluminescence; failure modes; hot carrier energy distributions; instrument response corrected spectroscopy; photon emission microscopy system; reliability characterization; spectral analysis; Assembly systems; Electroluminescent devices; Energy resolution; Failure analysis; Instruments; Integrated circuit testing; Microscopy; Photonic integrated circuits; Spectroscopy; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 1993. 31st Annual Proceedings., International

Conference_Location

Atlanta, GA, USA

Print_ISBN

0-7803-0782-8

Type

conf

DOI

10.1109/RELPHY.1993.283327

Filename

283327