Title :
Thermally actuated probe arrays for manipulation and characterization of individual bio-cell
Author :
Beomjoon Kim ; Collard, D. ; Lagouge, M. ; Conseil, F. ; Legrand, B. ; Buchaillot, L.
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
We introduce a new concept of thermal micro-actuators combined with electrical sensor device to capture and characterize individual living bio-cell. In our micro fabricated device, cantilevers integrated with sensing part (surface micro-machined poly-silicon) and actuation using the difference of the thermal expansion coefficients between poly-Si and transparent thick polymer (SU-8), are built from a flow channel on the substrate. This paper deals with the detail fabrication, actuation of device and the simulation results for our bimorph probe arrays. The motion of the actuated device is well coincident with the calculated value.
Keywords :
biosensors; electric sensing devices; elemental semiconductors; microactuators; polymers; silicon; thermal expansion; SU-8; Si; bimorph probe arrays; biocell; cantilevers; channel flow; electrical sensor device; microfabricated device; surface micromachined polysilicon; thermal expansion; thermal microactuators; thermally actuated probe arrays; transparent thick polymer; Actuators; Biosensors; Electric variables measurement; Etching; Fabrication; Fluidics; Force measurement; Optical sensors; Probes; Sensor arrays;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217000
