Fluid-structure coupling analysis and simulation of a micromachined piezo microjet

Author

Changgeng Liu ; Tianhong Cui ; Zhaoying Zhou ; Kun Lian ; Goettert, J.

Author_Institution

Center for Adv. Microstruct. & Devices, Louisiana State Univ., Baton Rouge, LA, USA

Volume

2

fYear

2003

Firstpage

1271

Abstract

A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement responses of the transducer under liquid-loading and unloading are calculated and compared. From numerical results, while the coupling interactions dramatically damp the vibration amplitude of the transducer, the effects on the resonant frequencies of the structure are negligible, which is very important for further design optimization of the device. Based on the optimal design rules, the device has been fabricated and characterized.

Keywords

elemental semiconductors; finite element analysis; jets; liquid structure; micromechanical devices; nozzles; piezoelectric actuators; piezoelectric transducers; silicon; Si; coupling interactions; design optimization; finite-element method; fluid-structure coupling analysis; liquid-loading; micromachined piezo microjet; physical effects; resonant frequencies; transducer; Aerodynamics; Aerosols; Analytical models; Chemicals; Drug delivery; Etching; Instruments; Piezoelectric transducers; Resonant frequency; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1217004

Filename

1217004