Investigation on pulsed surface discharge phenomena of silicon in atmosphere

Based on the measurement of voltage and current waveforms and the optical observation, the pulsed surface discharge phenomena across silicon samples were examined in atmospheric air. The surface of each sample was preprocessed by different mechanical or chemical methods, and some influences of surface condition on experimental results were discussed. Some interesting phenomena were reported. It was suggested that charge carriers (electrons and holes) were injected into the surface states of silicon. At a critical applied voltage, injected electrons could be detrapped and also lead to secondary electron emission and the desorption of adsorbed gases. Electrode metal particles may fly out and land on the surface of silicon. These processes would greatly affect the development of surface discharge. These assumptions need to be further confirmed.