Fabrication of nanochannels using glass to glass anodic bonding

In this work, we present a technology for fabrication of nanochannels created in glass with which bio-analysis can be performed in combination with fluorescence microscopy. The technology is based on a glass-to-glass anodic bonding process. In the bonding process, an intermediate layer (thin insulating film) is deposited on one of the two glass wafers. The channel is then defined, with one photo-patterning step, in the intermediate layer. In our approach, a 33 nm thick amorphous silicon layer (deposited by LPCVD) was used as an intermediate layer. The depth of the channel is defined during the etching of this layer.