Multi-transducer recordings from a single-chip gas sensor system coated with different polymers

The performance of a single-chip three-transducer CMOS gas sensor microsystems is demonstrated, which has been coated with different polymers. The three different transducers (mass-sensitive, calorimetric, capacitive) on the same chip inherently provide complementary information, such as analyte volatility (mass-sensitive), polarity (capacitive), and ab/desorption heat (calorimetric). By combining several of those single chip systems, each of which has a different polymeric coating, in an array, even more information on the detected analyte is accessible that can be used to classify and quantify organic volatiles as will be shown below.