Title :
A novel micro-gas sensor using laterally grown carbon nanotubes
Author :
Yoon-Taek Jang ; Chang-Hoon Choi ; Seung-Il Moon ; Jin-Ho Ahn ; Yun-Hi Lee ; Byeong-Kwon Ju
Author_Institution :
Microsyst. Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
We experimentally present the multiwalled carbon (MWNT) based gas sensor by a direct nano-wiring between Nb electrodes. Upon exposure MWNT to NH/sub 3/, the electrical resistance of the MWNTs is found to increase. The increase of temperature and gas concentration actually reduces the response time and increases the sensitivity to introduction of gas, respectively. Our results show a promising technique for forming CNT bridges between electrodes for chemical gas sensor at room temperature.
Keywords :
ammonia; carbon nanotubes; electrical resistivity; electrodes; gas sensors; microsensors; nanowires; niobium; sensitivity; 293 to 298 K; C-Nb; CNT bridges; MWNT gas sensor; NH/sub 3/; Nb electrodes; chemical gas sensor; direct nanowiring; electrical resistance; gas concentration; laterally grown carbon nanotubes; micro-gas sensor; multiwalled carbon based gas sensor; room temperature; sensitivity; Carbon nanotubes; Chemical sensors; Chemical vapor deposition; Electric resistance; Electrodes; Gas detectors; Gases; Niobium; Scanning electron microscopy; Temperature sensors;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217027
