Monte Carlo simulation of electron-beam induced charge-up phenomena of Teflon thermal blanket

Author

Fuji, H. ; Palov, A. ; Muto, H.

Author_Institution

Dept. of Electr. Eng., Nara Nat. Coll. of Technol., Japan

Volume

2

fYear

2004

Firstpage

963

Abstract

We propose a new method describing a charge-up phenomenon induced by electron beam in Teflon film from a microscopic viewpoint. The physical model of the 1 eV-30 keV electron scattering in the insulating polymer is used to calculate the charge distribution inside Teflon film. The electric field and the potential distribution as a function of the irradiation time are calculated from Poisson´s equation. The relaxation of the charge density under its own electric field is not considered in the present method. The calculated surface potential is in good agreement with our experimental data.

Keywords

Monte Carlo methods; Poisson equation; electron beam effects; organic insulating materials; polymer films; surface charging; surface potential; thermal insulating materials; 1 eV to 30 keV; Monte Carlo simulation; Poisson equation; charge density relaxation; charge distribution; electric field distribution; electric potential distribution; electron beam induced charge-up process; electron beam irradiation time; electron scattering; insulating polymer; microscopic analysis; surface potential; teflon film; teflon thermal blanket; Electric potential; Electron beams; Electron microscopy; Plasma materials processing; Plasma temperature; Poisson equations; Polymer films; Satellites; Surface charging; Thermal engineering;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid Dielectrics, 2004. ICSD 2004. Proceedings of the 2004 IEEE International Conference on

Print_ISBN

0-7803-8348-6

Type

conf

DOI

10.1109/ICSD.2004.1350592

Filename

1350592