Large electrostatically and electromagnetically actuated mirror system for space applications

Author

Bayat, Dara ; Ataman, Caglar ; Guldimann, Benedikt ; Lani, Sebastian ; Noell, Wilfried ; De Rooij, Nico F.

Author_Institution

Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland

fYear

2010

Firstpage

193

Lastpage

194

Abstract

We present the design and microfabrication technology of a tip-tilt 2 degree of freedom mirror system made out of SOI wafers with two movable mirrors that have diameters of 1cm. The system is intended for precise beam positioning applications and tracking. Having two mirrors allows one mirror to have large static mechanical scan angles (±3.5°) and the other to have fast fine pointing capabilities within ±0.2° static mechanical scan angle. The first mirror is magnetically actuated and has a resonance frequency of 150Hz. The second mirror is actuated electrostatically and has a resonance frequency of 1 KHz. This mirror enables rapid fine-pointing. Potential space applications are robotic 3D vision, imaging LIDARS, docking sensors and inter-satellite laser communications.

Keywords

beam steering; integrated optoelectronics; micro-optomechanical devices; microfabrication; micromirrors; optical design techniques; optical fabrication; optical scanners; MEMS-based optical-beam steering scanners; SOI wafers; electromagnetically actuated mirror; electrostatically actuated mirror; frequency 1 kHz; frequency 150 Hz; microfabrication; movable mirrors; optical design; resonance frequency; tip-tilt 2 degree of freedom mirror; Coils; Force; Magnetic resonance imaging; Magnetic separation; Magnetomechanical effects; Mirrors; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Conference_Location

Sapporo

Print_ISBN

978-1-4244-8926-8

Electronic_ISBN

978-1-4244-8925-1

Type

conf

DOI

10.1109/OMEMS.2010.5672118

Filename

5672118