Title :
Investigation of strain sensitivity of photonic crystal nanocavity for mechanical sensing
Author :
Tung, Bui Thanh ; Dao, Dzung Viet ; Sugiyam, Susumu
Author_Institution :
Ritsumeikan Univ., Kusatsu, Japan
Abstract :
This paper reports the theoretical investigation of the strain sensitive effect of a 2D photonic crystal (PhC) nanocavity resonator for mechanical sensing applications. By using finite element method (FEM) using ANSYS software and finite different time domain (FDTD) simulation using CrystalWave software, the strain sensitivity of high quality factor PhC nanocavity have been studied. Linear relationships between strain and shift of resonant wavelength of the cavity have been obtained. The sensitivities to longitudinal and transverse strains have been determined to be 1.67 nm/mε and 1.4 nm/mε, respectively.
Keywords :
cavity resonators; finite difference time-domain analysis; finite element analysis; photonic crystals; strain sensors; ANSYS software; CrystalWave software; finite different time domain simulation; finite element method; longitudinal strains; mechanical sensing; photonic crystal nanocavity; resonant wavelength shift; strain sensitivity; transverse strains; Cavity resonators; Optical resonators; Sensors; Silicon; Strain; Stress; Time domain analysis;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672122
