Production of 64×64 hybrid semiconductor detector arrays for biomedical applications

Over the past year, we have produced 21 hybrid semiconductor arrays. Each hybrid is composed of a 64×64 readout integrated circuit, indium bump bonded to a pixelated semiconductor array made of CdZnTe or CdTe. The focus of this effort has been to produce a few nearly perfect devices for use in planar spot-imaging systems and a small-animal SPECT imager. We have succeeded in producing a few arrays with >99% functional pixels that can approximate a perfect detector if small numbers of bad pixels are removed by smoothing with nearest-neighbor pixels. The key to this effort is careful selection of detector materials using infrared transmission mapping and gamma-ray response mapping, as well as the limitation of pixel losses in the fabrication process.