Title :
Configuration analysis of sensing element for micro-cantilever sensor using dual nano-ring resonator
Author :
Li, Bo ; Hsiao, Fu-Li ; Lee, Chengkuo
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
Two photonic crystal rings of hexagonal lattice are lying transversely and longitudinally in silicon micro-cantilever at the junction of the microcantilever and the substrate. This unique dual nano-ring (DNR) resonator demonstrates channel drop filter characteristics. When DNR is used as sensing element of a microcantilever sensor, the wavelength shift of resonant peak measured at the backward drop terminal is a function of applied force at the microcantilever tip. The derived Q-factor is about 3000, and the minimum detectable force can be as small as 37nN for longitudinal case and 16.7nN for transverse case.
Keywords :
Q-factor; cantilevers; microsensors; nanophotonics; optical resonators; photonic crystals; Q-factor; channel drop filter; configuration analysis; dual nano-ring resonator; hexagonal lattice; microcantilever sensor; microcantilever tip; photonic crystal rings; sensing element; silicon microcantilever; Artificial neural networks; Finite difference methods; Force; Optical filters; Optical resonators; Shape; Silicon;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672125
