Title :
Preparation of anodic aluminum oxide nano-template using Al/Si substrate for large area LED applications
Author :
Shen, Lan ; Kim, Doogwook ; Min, Bonggi ; Gu, Zhengbin ; Park, Chinho
Author_Institution :
Yeungnam Univ., Gyeongsan, South Korea
Abstract :
Anodic aluminum oxide (AAO) nano-templates were prepared using the Al/Si substrates with the thickness of the aluminum films of about 500 nm. The pores of various sizes and depths were fabricated electrochemically through anodic oxidation. The optimum morphological structure for large area InGaN LED applications was formed by adjusting the applied potential, temperature, types of acid solution and their concentration. Scanning electron microscopy (SEM) investigations showed that hexagonal-close-packed nanopore arrays have smooth wall morphologies and well-defined diameters corresponding to the diameter of the applied template.
Keywords :
aluminium compounds; anodisation; electrochemistry; nanofabrication; nanoporous materials; Al-Si; Al2O3; anodic oxidation; hexagonal-close-packed nanopore arrays; morphological structure; nanotemplates; scanning electron microscopy; thin films; Aluminum oxide; Films; Light emitting diodes; Nanostructures; Silicon; Substrates;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672133
