• DocumentCode
    1728993
  • Title

    Design and implementation of the control system to vacuum diffusion furnace

  • Author

    Li Cong ; Zhang Yaning ; Dai Houzhao

  • Author_Institution
    Sch. of Electr. Eng., Univ. of Jinan, Jinan, China
  • fYear
    2013
  • Firstpage
    6428
  • Lastpage
    6432
  • Abstract
    This paper proposed the design proposal of the control system for vacuum furnace. The control system consist of a field bus control system (FCS) based on industrial control machine, PLC, intelligent PID instrument etc. The whole system realizes four closed loop controls of three sections of the furnace, which include temperature PID control, gas flow tracking control, Push-pull boat tracking control and furnace vacuum PI control. The upper computer programming software realizes the design of all kinds of control software by using the VB.NET and Access database, which mainly complete equipment monitoring and acquisition all kinds of real-time data of industrial production, control and monitor operation situation of lower computer equipment, store the history data of equipments, download/upload production process data and generate data curves and so on, and make the operation situation of whole process easier to control. Practice proves that the system is reliable operation and meets the demand of precision, and can completely replace the imported products.
  • Keywords
    closed loop systems; control engineering computing; control system synthesis; field buses; flow control; furnaces; production engineering computing; programmable controllers; semiconductor industry; temperature control; three-term control; Access database; PLC; VB.NET; closed loop control; computer programming software; control system design; equipment monitoring; field bus control system; furnace vacuum PI control; gas flow tracking control; industrial control machine; intelligent PID instrument; push-pull boat tracking control; realtime data acquisition; semiconductor production line; temperature PID control; vacuum diffusion furnace; Computers; Furnaces; Instruments; Process control; Temperature control; Vacuum systems; Access Database; Diffusion furnace; Industrial control computer; PLC; Temperature Instrument; VB.NET;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Control Conference (CCC), 2013 32nd Chinese
  • Conference_Location
    Xi´an
  • Type

    conf

  • Filename
    6640566