Title :
Investigations of SAW delay lines on c-plane AlN/sapphire at elevated temperatures
Author :
Bruckner, Gudrun ; Bardong, Jochen ; Fachberger, René ; Forsén, Esko ; Eisele, David
Author_Institution :
Carinthian Tech Res. AG, CTR AG, Villach, Austria
Abstract :
Aluminum nitride (AlN) on sapphire is a promising substrate for SAW (surface acoustic wave) sensors operating at high temperatures and high frequencies. To get an experimental measure of the suitability and temperature stability of such devices, several samples of SAW delay lines were fabricated on 2" c-plane (0001) sapphire substrates with 1 μm c-plane AlN layer on top. Time- and frequency responses were recorded during annealing treatments at temperatures up to 850°C and the signals were analyzed afterwards.
Keywords :
aluminium compounds; sapphire; surface acoustic wave delay lines; surface acoustic wave sensors; AlN; SAW delay lines; SAW sensors; annealing treatments; c-plane sapphire substrates; elevated temperatures; frequency response; size 1 mum; surface acoustic wave sensors; temperature 850 degC; temperature stability; time response; Delay; Delay lines; Electrodes; Plasma temperature; Substrates; Temperature measurement; Temperature sensors;
Conference_Titel :
Frequency Control Symposium (FCS), 2010 IEEE International
Conference_Location :
Newport Beach, CA
Print_ISBN :
978-1-4244-6399-2
DOI :
10.1109/FREQ.2010.5556280
