Diffractive optical elements in titanium oxide for MOEMS applications

Author

Parashar, V.K. ; Sayah, A. ; Cuche, E. ; Depeursinge, C. ; Gijs, M.A.M.

Author_Institution

Inst. Microelectron. & Microsyst., Swiss Fed. Inst. of Technol., Lausanne, Switzerland

Volume

2

fYear

2003

Firstpage

1482

Abstract

We demonstrate a new technology for the replication of titanium oxide glass micro- and nanostructures. Diffractive optical elements, like gratings, and Fresnel lenses with structural features down to 600 nm, are replicated in polymer moulds starting from liquid glass solutions. The salient features of the TiO/sub 2/ microstructures are: a high refractive index (of the order of 1.95-1.99), excellent transparence in the visible range and photocatalytic activity under UV illumination, which induces super-hydrophilicity. The latter property is of importance for anti-fogging and self-cleaning properties of the optical structures.

Keywords

cleaning; diffraction gratings; diffractive optical elements; glass; glass structure; lenses; micro-optics; nanostructured materials; photochemistry; refractive index; titanium compounds; transparency; 600 nm; Fresnel lenses; TiO/sub 2/; UV illumination; anti-fogging; diffractive optical elements; liquid glass solutions; optical structure; photocatalytic activity; polymer moulds; refractive index; self-cleaning properties; super-hydrophilicity; titanium oxide glass microstructure; titanium oxide glass nanostructure; transparency; Diffraction gratings; Fresnel reflection; Glass; Microstructure; Nanostructures; Optical diffraction; Optical polymers; Optical refraction; Optical variables control; Titanium;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1217057

Filename

1217057