Title :
Diffractive optical elements in titanium oxide for MOEMS applications
Author :
Parashar, V.K. ; Sayah, A. ; Cuche, E. ; Depeursinge, C. ; Gijs, M.A.M.
Author_Institution :
Inst. Microelectron. & Microsyst., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
Abstract :
We demonstrate a new technology for the replication of titanium oxide glass micro- and nanostructures. Diffractive optical elements, like gratings, and Fresnel lenses with structural features down to 600 nm, are replicated in polymer moulds starting from liquid glass solutions. The salient features of the TiO/sub 2/ microstructures are: a high refractive index (of the order of 1.95-1.99), excellent transparence in the visible range and photocatalytic activity under UV illumination, which induces super-hydrophilicity. The latter property is of importance for anti-fogging and self-cleaning properties of the optical structures.
Keywords :
cleaning; diffraction gratings; diffractive optical elements; glass; glass structure; lenses; micro-optics; nanostructured materials; photochemistry; refractive index; titanium compounds; transparency; 600 nm; Fresnel lenses; TiO/sub 2/; UV illumination; anti-fogging; diffractive optical elements; liquid glass solutions; optical structure; photocatalytic activity; polymer moulds; refractive index; self-cleaning properties; super-hydrophilicity; titanium oxide glass microstructure; titanium oxide glass nanostructure; transparency; Diffraction gratings; Fresnel reflection; Glass; Microstructure; Nanostructures; Optical diffraction; Optical polymers; Optical refraction; Optical variables control; Titanium;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217057
