Title :
A novel technique for extraction of thermal conductivity in metallic thin films
Author :
Zong, Zhao-Xiang ; Qiu, Zhi-Jun ; Liu, Ran
Author_Institution :
Key Lab. of ASIC & Syst., Fudan Univ., Shanghai, China
Abstract :
The frequency-dependent thermal response in 3ω measurement is investigated using transient electro-thermal coupling simulations. Furthermore, the heat flow ratio m(ω), quantifying the deviation degree of Cahill´s model, is exploited for extraction of the thermal conductivity of the heater strip itself, which extends the capability of 3ω method to high-thermal-conductivity thin films.
Keywords :
heat transfer; metallic thin films; thermal conductivity measurement; Cahill´s model; deviation degree; frequency dependent thermal response; heat flow ratio; metallic thin films; thermal conductivity; transient electro thermal coupling simulations; Conductivity; Resistance heating; Strips; Temperature measurement; Thermal conductivity; Thermal resistance;
Conference_Titel :
Solid-State Device Research Conference (ESSDERC), 2011 Proceedings of the European
Conference_Location :
Helsinki
Print_ISBN :
978-1-4577-0707-0
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2011.6044164
