Title :
Electro-statically actuated light emitting device using OLED
Author :
Motoyama, M. ; Hoshino, K. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution :
Tokyo Univ., Japan
Abstract :
We propose a process of a light emitting device fabricated on the top surface of a micro structure. The proposed process has made it possible to fabricate light sources on silicon micro actuators released partly from the wafer. A light source is an Organic Light Emitting Diode (OLED) composed of electrodes and an organic layer evaporated on the top surface of a micro structure.
Keywords :
electrostatic actuators; elemental semiconductors; light sources; organic light emitting diodes; silicon; OLED top surface; Si; device microstructure; electrodes; electrostatically actuated light emitting device; light sources; organic layer evaporation; organic light emitting diode; silicon micro actuators; Aluminum; Anodes; Cathodes; Electrodes; Fabrication; Insulation; Light sources; Organic light emitting diodes; Silicon; Voltage;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217063
