Title :
Development of three-dimensional electrostatic stages for scanning probe microscope
Author_Institution :
Inst. of Mech. Syst. Eng., Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan
Abstract :
We have designed and fabricated three-dimensional (3D) stages driven by electrostatic comb actuators. The stage consists of traveling tables, suspensions and comb actuator(s). The key to realizing 3D motions is in the geometry of the suspensions, which incorporate a pair of leaf springs inclined at 45 degrees against the substrate. First, the motions of the stage were analyzed by FEM (finite element method). Then 3D stages were fabricated on an SOI (silicon on insulator) wafer. The relation between the vertical displacement and driving voltage was examined.
Keywords :
electrostatic actuators; finite element analysis; scanning probe microscopy; silicon-on-insulator; suspensions; 3D motions; FEM; SOI wafer; Si; electrostatic comb actuators; finite element method; leaf springs; scanning probe microscope; silicon on insulator wafer; suspensions; three-dimensional electrostatic stages; traveling tables; vertical displacement; Electrostatic actuators; Finite element methods; Geometry; Microscopy; Motion analysis; Probes; Silicon on insulator technology; Springs; Suspensions; Voltage;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217068
