Multilayer piezoelectric ceramic actuator for laser scanner

Author

Song, Jae-sung ; Kim, In-sung ; Jeong, Soon-Jong ; Kim, Min-soo

Author_Institution

Korea Electrotechnol. Res. Inst., Changwon, South Korea

fYear

2010

Firstpage

129

Lastpage

130

Abstract

This work studies the lead magnesium niobate-lead zirconium titanate (PMN-PZT) multilayer ceramic actuators (MLCA) for laser scanner applications. PMN-PZT MLCA was fabricated. 5×5×30 mm³ size MLCA was fabricated by conventional tape casting method. The displacement of the MLCA with 30 mm thickness was ~30 μm at 150 V Tilt stage consisting of multilayer actuator and two hinge type lever mechanisms was investigated. Circular hinge type mechanism showed translation from linear motion to rotation motion along with stroke amplification. The hinge-based mechanical platform showed one-to-one linear translation with strain amplifier, which is suitable for high precision control system.

Keywords

ceramics; lead compounds; magnesium compounds; micro-optomechanical devices; microactuators; optical fabrication; optical materials; optical multilayers; optical scanners; piezoelectric actuators; tape casting; PMN-PZT; circular hinge type mechanism; laser scanner; lead magnesium niobate-lead zirconium titanate; multilayer piezoelectric ceramic actuator; precision control; rotation motion; size 30 mm; size 5 mm; tape casting; voltage 150 V; Conferences; Micromechanical devices; Nanophotonics;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Conference_Location

Sapporo

Print_ISBN

978-1-4244-8926-8

Electronic_ISBN

978-1-4244-8925-1

Type

conf

DOI

10.1109/OMEMS.2010.5672151

Filename

5672151