Title :
Multilayer piezoelectric ceramic actuator for laser scanner
Author :
Song, Jae-sung ; Kim, In-sung ; Jeong, Soon-Jong ; Kim, Min-soo
Author_Institution :
Korea Electrotechnol. Res. Inst., Changwon, South Korea
Abstract :
This work studies the lead magnesium niobate-lead zirconium titanate (PMN-PZT) multilayer ceramic actuators (MLCA) for laser scanner applications. PMN-PZT MLCA was fabricated. 5×5×30 mm3 size MLCA was fabricated by conventional tape casting method. The displacement of the MLCA with 30 mm thickness was ~30 μm at 150 V Tilt stage consisting of multilayer actuator and two hinge type lever mechanisms was investigated. Circular hinge type mechanism showed translation from linear motion to rotation motion along with stroke amplification. The hinge-based mechanical platform showed one-to-one linear translation with strain amplifier, which is suitable for high precision control system.
Keywords :
ceramics; lead compounds; magnesium compounds; micro-optomechanical devices; microactuators; optical fabrication; optical materials; optical multilayers; optical scanners; piezoelectric actuators; tape casting; PMN-PZT; circular hinge type mechanism; laser scanner; lead magnesium niobate-lead zirconium titanate; multilayer piezoelectric ceramic actuator; precision control; rotation motion; size 30 mm; size 5 mm; tape casting; voltage 150 V; Conferences; Micromechanical devices; Nanophotonics;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672151
