Fabrication and evaluation of piezoelectric drive type 2-axis tilt control device using epitaxial PZT thin film

Author

Ozaki, Katsuya ; Akai, Daisuke ; Sawada, Kazuaki ; Ishida, Makoto

Author_Institution

Toyohashi Univ. of Technol., Toyohashi, Japan

fYear

2010

Firstpage

125

Lastpage

126

Abstract

Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr_0.52, Ti_0.48)O₃ (PZT) thin film on epitaxial γ-Al₂O₃/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO₃(111)/Pt(111)/ γ-Al₂O₃(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF₂ gas etching. The fabricated device showed polarization-electric field (P-E) hysteresis loop of piezoelectric PZT thin film and the deflection. Therefore, the realization of piezoelectric drive type deformable mirrors (DMs) using epitaxial PZT thin film can be expected.

Keywords

dielectric hysteresis; epitaxial layers; etching; lead compounds; micromirrors; optical fabrication; piezoelectric devices; sol-gel processing; Al₂O₃-Si; PZT; deformable mirrors; epitaxial PZT thin film; gas etching; piezoelectric drive type 2-axis tilt control; polarization-electric field hysteresis; sol-gel deposition; Electrodes; Epitaxial growth; Etching; Fabrication; Hysteresis; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Conference_Location

Sapporo

Print_ISBN

978-1-4244-8926-8

Electronic_ISBN

978-1-4244-8925-1

Type

conf

DOI

10.1109/OMEMS.2010.5672153

Filename

5672153