DocumentCode :
1729436
Title :
Electrochemical etching for micromachining of corrosion resistant alloys
Author :
Mineta, T.
Author_Institution :
Yamagata Res. Inst. of Technol., Japan
Volume :
2
fYear :
2003
Firstpage :
1542
Abstract :
In this paper, basic characteristics of an electrochemical etching of Ni-Fe corrosion resistant alloys (Inconel, Hasteloy, stainless steel) and other Ni-Fe alloys (Permalloy, Kovar) have been studied. All alloys could be electrochemical etched similarly in LiCl-methanol electrolyte. At wide pattern space, etched surface was rough and etched profile became W-shape. However, good etching with mirror like smooth surface could be carried out at narrow pattern for all alloys. Etch rates were about 13/spl mu/m/min and etch factors were as high as 1.5. The electrochemical etching technique has been applied to not only fine patterning, but also wide pattern etching by connecting of neighboring narrow etched patterns with side etching. The electrochemical etching has been also applied to non-planar micromachining of cylindrical surface of a rod and a pipe of corrosion resistant alloys.
Keywords :
Permalloy; corrosion resistance; electrolytes; etching; micromachining; stainless steel; superalloys; Inconel; Kovar; LiCl-methanol electrolyte; MEMS; NiFe corrosion resistant alloys; Permalloy; cylindrical surface; electrochemical etching; etch rates; etched profile; fine patterning; hasteloy; nonplanar micromachining; pipe; rod; stainless steel; wide pattern etching; Corrosion; Etching; Iron alloys; Micromachining; Mirrors; Nickel alloys; Rough surfaces; Steel; Surface roughness; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
Type :
conf
DOI :
10.1109/SENSOR.2003.1217072
Filename :
1217072
Link To Document :
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