• DocumentCode
    1729442
  • Title

    Torsional mirror driven by a cantilever beam integrated with 1×10 individually biased PZT array actuator for VOA application

  • Author

    Koh, Kah How ; Kobayashi, Takeshi ; Lee, Chengkuo

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
  • fYear
    2010
  • Firstpage
    119
  • Lastpage
    120
  • Abstract
    A gold coated silicon mirror (5mm × 5mm) actuated by 1×10 piezoelectric Pb(Zr, Ti)O3 (PZT) array actuator integrated on a cantilever beam has been demonstrated for variable optical attenuator (VOA) application. Torsional attenuation based on the difference in the dc biasing voltage applied to the 1×10 PZT array actuator was investigated. The dynamic attenuation range of 40dB at 1.8V DC bias is observed in the attenuation curve.
  • Keywords
    beams (structures); cantilevers; gold; micromirrors; optical arrays; optical attenuators; piezoelectric actuators; silicon; PZT; PZT array actuator; Si-Au; VOA; cantilever beam; silicon mirror; torsional mirror; variable optical attenuator; voltage 1.8 V; Actuators; Attenuation; Micromechanical devices; Mirrors; Optical attenuators; Silicon; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
  • Conference_Location
    Sapporo
  • Print_ISBN
    978-1-4244-8926-8
  • Electronic_ISBN
    978-1-4244-8925-1
  • Type

    conf

  • DOI
    10.1109/OMEMS.2010.5672154
  • Filename
    5672154
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1729442