Title :
Micro-torque sensor based on differential force measurement
Author :
Gass, V. ; van der Schoot, B.H. ; Jeanneret, S. ; de Rooij, N.F.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
fDate :
6/16/1905 12:00:00 AM
Abstract :
A torque sensing device based on differential force measurement having a resolution of 0.05 μN.m over a working range from -200 μN.m to 200 μN.m is presented, The volume of the device is 3 cm by 3 cm by 1 cm. This paper shows that the simultaneous use of silicon bulk-machined components and miniaturised high precision mechanical structures in a hybrid configuration can solve industrial measurement problems elegantly
Keywords :
torque measurement; Si; Si bulk-machined components; Wheatstone bridge; differential force measurement; hybrid configuration; industrial measurement; micro-torque sensor; miniaturised high precision mechanical structures; watch making; Blades; Energy storage; Fasteners; Force measurement; Force sensors; Shafts; Silicon; Springs; Torque measurement; Watches;
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso
Print_ISBN :
0-7803-1833-1
DOI :
10.1109/MEMSYS.1994.555630
