Title :
Pure piston motion of optically flat micromirrors in a fully programmable micro diffraction grating
Author :
Lockhart, R. ; Stanley, R.P. ; Tormen, M.
Author_Institution :
CSEM SA (Swiss Center of Electron. & Microtechnol.), Switzerland
Abstract :
We present a fully programmable micro diffraction (F-PMDG) grating in which each micromirror in a 1D array can be individually deflected out-of-plane by up to 1 μm. The maximum operating voltage is <;30V and the lowest resonant frequency is >10kHz. The 120 μm wide and 700 μm long mirrors are designed to remain optically flat during actuation. The peak-to-valley curvature of a fully actuated micromirror is shown to be 10 nm equal to a radius of curvature of 7m. Fabrication of the F-PMDG requires only three photolithography masks.
Keywords :
actuators; diffraction gratings; micromirrors; photolithography; pistons; actuation; fully programmable microdiffraction grating; optically flat micromirrors; photolithography masks; piston motion; size 120 mum; size 700 mum; Micromirrors; Optical device fabrication; Optical distortion; Optical imaging; Optical interferometry; Optical reflection;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672162
