The temperature compensation of a thermal flow sensor with a mathematical method

The thermal air-flow sensor, which is heated to a temperature with a constant degree of difference from that of the gas, provides power consumption according to the flow rates. The flow signal output of the sensor decreases depending on the rise in ambient temperature. This paper suggests a new method for temperature compensation, which is necessary to thermal thin film flow sensors based on the Wheatstone-bridge-equilibrium. we pointed out the error of the temperature compensation resulted from Wheatstone-bridge-equilibrium, so we present a new temperature-compensation method which uses the mathematical method. The compensation, the alteration of Rh-slope is possible in mathematical method.