Title :
Lamellar grating based MEMS Fourier Transform Spectrometer
Author :
Seren, Hüseyin R. ; Ayerden, N. Pelin ; Sharma, Jaibir ; Holmström, Sven T S ; Sandner, Thilo ; Grasshoff, Thomas ; Schenk, Harald ; Urey, Hakan
Author_Institution :
Dept. of Electr. Eng., Koc Univ., Istanbul, Turkey
Abstract :
A Lamellar grating interferometer based Fourier Transform Infrared Spectrometer (FTIR) with out-of-plane resonant mode is implemented and characterized. Device has 10 mm^2 clear aperture. Dynamic diffraction grating is comb-actuated and a maximum p-p deflection of 355 μm is obtained at 76 V. The excitation frequency is 971 Hz and deflection frequency of 485.5Hz.
Keywords :
Fourier transform spectrometers; diffraction gratings; infrared spectrometers; light interferometers; micro-optomechanical devices; Fourier transform infrared spectrometer; MEMS; comb actuation; deflection frequency; dynamic diffraction grating; excitation frequency; frequency 485.5 Hz; frequency 971 Hz; lamellar grating; p-p deflection; voltage 76 V; Diffraction gratings; Fingers; Fourier transforms; Gratings; Micromechanical devices; Optical interferometry; Optical sensors;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672163
