Design consideration of micro gyroscope stabilized for acceleration

We present a rotational cylinder-shaped micro gyro-scope, which is optimized to stable operation for acceleration. The vibrating cylinder is supported by a double ended torsion bar through a membrane-like spring. In this structure, since the center of gravity of the mass is placed on the center of the support spring, any torque dose not occur when acceleration is applied. The reference vibration is driven by electrostatic force and the detection of Coriolis force is achieved by the capacitance change. In this paper, we optimize structural parameters of the device from analytical formulations.