Title :
MEMS high resolution 4-20 mA current sensor for industrial I/O applications
Author :
DeNatale, J. ; Borwick, R. ; Stupar, P. ; Anderson, R. ; Garrett, K. ; Morris, W. ; Yao, J.J.
Author_Institution :
Rockwell Sci. Co., Thousand Oaks, CA, USA
Abstract :
An isolated MEMS-based 4-20 mA current sensor device has been developed for industrial automation applications. This device consists of a current carrying suspension that is electrically isolated, yet mechanically coupled to a bank of capacitive comb fingers. Under the presence of a magnetic field, the sense current produces a Lorentz force that laterally deflects the device. The deflection is capacitively detected. Using various flexure designs to tune the sensitivity and current capacity, this device can be made highly linear with a sensitivity of 0.25 /spl mu/A.
Keywords :
automation; capacitive sensors; electric sensing devices; microsensors; 4 to 20 mA; Lorentz force; MEMS; capacitive comb finger; capacitive detection; current carrying suspension; electrical isolation; flexure design; industrial automation application; magnetic field; sensitivity; Capacitance; Capacitors; Conductors; Etching; Isolation technology; Lorentz covariance; Magnetic fields; Magnetic sensors; Micromechanical devices; Temperature sensors;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217086
