Title :
Inertial force sensor using optical Mach-Zehnder Interferometer and multi mode interferometer
Author :
Suzuki, Masato ; Kawai, Gou ; Nishioka, Kouji ; Takahashi, Tomokazu ; Aoyagi, Seiji ; Amemiya, Yoshiteru ; Fukuyama, Masataka ; Yokoyama, Shin
Author_Institution :
Fac. of Eng. Sci., Kansai Univ., Suita, Japan
Abstract :
In this paper, a novel inertial force sensor which uses a Mach-Zehnder Interferometer (MZI) type optical waveguide made of crystal silicon is proposed. In this sensor, one branched waveguide of the MZI have floating beam structure, and it is intersected with a cantilever for supporting a proof mass in same plane. To prevent optical loss at the intersection, only the intersectional point of floating waveguide has multi-mode interference (MMI) structure. Efficacy of the MMI waveguide is confirmed by simulation and experimental results. Conclusively, it has succeeded in changing in output of the fabricated initial force sensor by applied force.
Keywords :
Mach-Zehnder interferometers; elemental semiconductors; force sensors; optical losses; optical sensors; optical waveguides; silicon; Si; cantilever; floating beam structure; inertial force sensor; multimode interferometer; optical Mach-Zehnder interferometer; optical loss; optical waveguide; Optical device fabrication; Optical fiber sensors; Optical fibers; Optical interferometry;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672165
