Title :
Micromachined two dimensional resistor arrays for determination of gas parameters
Author :
van Baar, J.J. ; Verweij WA ; Dijkstra, M. ; Wiegerink, R.J. ; Lammerink, T.S.J. ; Krijnen, G.J.M. ; Elwenspoek, M.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
A resistive sensor array is presented for two dimensional temperature distribution measurements in a micromachined flow channel. This allows simultaneous measurement of flow velocity and fluid parameters, like thermal conductivity, diffusion coefficient and viscosity. More general advantages of measuring temperature distributions are the inherent compensation of heat losses to the support and the insensitivity to variations in the temperature coefficient of resistance.
Keywords :
diffusion; electric sensing devices; flow measurement; heat losses; microsensors; silicon compounds; temperature measurement; thermal conductivity; thin film resistors; viscosity; wide band gap semiconductors; SiC; diffusion coefficient; flow velocity; fluid parameter; gas parameter; heat losses; micromachined flow channel; temperature coefficient of resistance; thermal conductivity; two dimensional resistive sensor array; viscosity; Conductivity measurement; Electrical resistance measurement; Fluid flow measurement; Resistors; Sensor arrays; Temperature distribution; Temperature measurement; Temperature sensors; Thermal conductivity; Velocity measurement;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217088
