Title :
Micromachined two dimensional lens scanner with large aperture beam
Author :
Park, Hyeon-Cheol ; Song, Cheol ; Jeong, Ki-Hun
Author_Institution :
Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
Abstract :
This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and y-scanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.
Keywords :
aspherical optics; electrostatic actuators; lenses; micro-optomechanical devices; microlenses; micromachining; optical scanners; aperture beam; electrostatic MEMS actuators; frequency 276.5 Hz; frequency 294.4 Hz; micromachining; millimeter aspheric glass lenses; optical path folding; two dimensional lens scanner; Glass; Lenses; Micromechanical devices; Optical fibers; Optical imaging;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672168
