• DocumentCode
    1729882
  • Title

    Substrate bias effects on short channel length and narrow channel width PMOS devices at cryogenic temperatures

  • Author

    Deen, M.J. ; Wang, J. ; Yan, Z.X. ; Zuo, Z.P.

  • Author_Institution
    Sch. of Eng. Sci., Simon Fraser Univ., Burnaby, BC, Canada
  • fYear
    1989
  • Firstpage
    53
  • Lastpage
    57
  • Abstract
    The effects of substrate biasing on the characteristics of PMOS devices with varying channel lengths and widths were studied as a function of temperature from 300 K to 77 K. Results on the low field intrinsic mobility, the mobility surface and substrate bias degradation constants, and the effective low field mobility are discussed. The variation of the peak substrate current normalized to the drain current and of drain-induced-barrier-lowering with substrate bias for both groups of devices is also presented and discussed
  • Keywords
    carrier mobility; cryogenics; insulated gate field effect transistors; semiconductor device testing; 77 to 300 K; PMOS devices; cryogenic temperatures; drain current; drain-induced-barrier-lowering; effective low field mobility; low field intrinsic mobility; mobility surface; narrow channel width; peak substrate current; short channel length; substrate bias degradation constants; substrate biasing; Cryogenics; Degradation; Doping; Integrated circuit interconnections; MOS devices; Rough surfaces; Surface resistance; Surface roughness; Tellurium; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Low Temperature Semiconductor Electronics, 1989., Proceedings of the Workshop on
  • Conference_Location
    Burlington, VT
  • Type

    conf

  • DOI
    10.1109/LTSE.1989.50181
  • Filename
    50181