Optical IMEMS/sup /spl reg//-a fabrication process for MEMS optical switches with integrated on-chip electronics

The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks. To address this potential market, Analog Devices has developed the Optical iMEMS/sup /spl reg// process for fabricating MEMS optical components with integrated, on-chip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the X- and Y-axis, with position sense in both directions of tilt.