Title :
Flexible display system based on MEMS Fabry-Perot interferometer
Author :
Tortissier, G. ; Lo, C.-Y. ; Fujita, H. ; Toshiyoshi, H.
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
Abstract :
Previous works on MEMS actuated Fabry-Perot interferometer (FPI) highlighted promising results for flexible display applications. Three primary color pixels have indeed been obtained using both photolithography and Roll-to-Roll printing process with satisfying color purity and transmittance. However both of these processes are expensive and time-consuming for preparing master micropatterns. For these reasons, a new process based on inkjet printing has been set up. It contributes in a more ecological-friendly, high reproducible and fast process development while targeting improved features.
Keywords :
Fabry-Perot interferometers; colour; flexible displays; ink jet printing; micro-optomechanical devices; Fabry-Perot interferometer; MEMS; color purity; flexible display system; inkjet printing; master micropatterns; photolithography; primary color pixels; roll-to-roll printing; transmittance; Color; Ink; Lithography; Micromechanical devices; Pixel; Printing; Substrates;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672176
