Title :
Linear MEMS micromirror array for UV-NIR femtosecond pulse shaping
Author :
Weber, Stefan M. ; Extermann, Jérôme ; Noell, Wilfried ; Jutzi, Fabio ; Lani, Sébastian ; Kiselev, Denis ; Bonacina, Luigi ; De Rooij, Nico F. ; Wolf, Jean-Pierre
Author_Institution :
GAP Biophotonics, Univ. de Geneve, Genève, Switzerland
Abstract :
We report our progress and the first optical application on the high-aspect ratio micromirror array for UV-NIR femtosecond (fs) broadband pulse shaping. It is a bulk-micromachined device. capable of individually addressing 100 mirrors with a stroke of up to 3 μm using vertical comb drives in a novel. symmetrical double-spring design. The device was successfully implemented in a fs pulse shaper setup at λ0=795 nm.
Keywords :
high-speed optical techniques; micro-optomechanical devices; micromachining; micromirrors; optical arrays; optical design techniques; optical pulse shaping; UV-NIR femtosecond broadband pulse shaping; bulk-micromachined device; linear MEMS micromirror array; symmetrical double-spring design; vertical comb; wavelength 795 nm; Conferences; Micromechanical devices; Nanophotonics;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672184
