• DocumentCode
    1730308
  • Title

    Tunable optical diffusers for high-power laser applications based on magnetically actuated membranes

  • Author

    Masson, Jonathan ; Bich, Andreas ; Noell, Wilfried ; Voelkel, Reinhard ; Weible, Kenneth J. ; De Rooij, Nico F.

  • Author_Institution
    Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland
  • fYear
    2010
  • Firstpage
    61
  • Lastpage
    62
  • Abstract
    A dynamic laser beam shaper based on MEMS technology is presented. A magnetically actuated deformable single crystal silicon micromembrane is deformed in resonance to diffuse and homogenize laser beams. The large aperture mirror shows line generation with angles up to 1° and line smoothing capabilities. High power density handling is demonstrated up to 140 W/cm2.
  • Keywords
    magneto-optical devices; membranes; micro-optomechanical devices; micromirrors; optical films; optical resonators; optical tuning; silicon; MEMS; Si; dynamic laser beam shaper; high power density handling; large aperture mirror; laser beams; magnetically actuated deformable single crystal silicon micromembrane; tunable optical diffusers; Biomembranes; Laser applications; Laser beams; Magnetic resonance; Mirrors; Optical reflection; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
  • Conference_Location
    Sapporo
  • Print_ISBN
    978-1-4244-8926-8
  • Electronic_ISBN
    978-1-4244-8925-1
  • Type

    conf

  • DOI
    10.1109/OMEMS.2010.5672185
  • Filename
    5672185
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1730308