Title :
Optically-powered wireless transmitter for high-temperature MEMS sensing and communication
Author :
Suster, M. ; Ko, W.H. ; Young, D.J.
Author_Institution :
Dept. of EECS, Case Western Reserve Univ., Cleveland, OH, USA
Abstract :
A high-temperature low-power silicon-tunnel-diode-based oscillator transmitter with an on-board optical power converter is proposed for harsh environment MEMS sensing and wireless data transmission applications. The prototype sensing and transmitting module employs a MEMS silicon capacitive pressure sensor performing pressure to frequency conversion and a coil loop serving as the inductor of the LC tank resonator and also as a transmitting antenna. A GaAs photodiode converts an incoming laser beam to electrical energy to power the prototype. The system achieves a telemetry performance up to 250/spl deg/C over a distance of 1.5 meters with a transmitter power consumption of approximately 60 /spl mu/W.
Keywords :
capacitive sensors; data communication equipment; elemental semiconductors; inductors; microsensors; optical frequency conversion; optical resonators; optical transmitters; power consumption; power convertors; pressure sensors; silicon; telemetry; transmitting antennas; tunnel diodes; wireless sensor networks; 1.5 m; 60 muW; GaAs photodiode; LC tank resonator; MEMS silicon; Si; capacitive pressure sensor; coil loop; communication; electrical energy; frequency conversion; high-temperature MEMS sensing; high-temperature low-power silicon-tunnel-diode-based oscillator transmitter; laser beam; optical power converter; optically-powered wireless transmitter; power consumption; telemetry; transmitting antenna; wireless data transmission; Data communication; Frequency conversion; Micromechanical devices; Optical resonators; Optical sensors; Optical transmitters; Oscillators; Prototypes; Silicon; Wireless sensor networks;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1217112
