DocumentCode
1730475
Title
Development and evaluation of a simulator for pneumatic anti-vibration apparatuses with six degrees-of-freedom using mode control
Author
Kaneko, Yuka ; Nakamura, Yukinori ; Wakui, Shinji ; Kim, Byung Sub ; Song, Chang Kyu
Author_Institution
Dept. of Electr. & Electron. Eng., Tokyo Univ. of Agric. & Technol., Koganei, Japan
fYear
2012
Firstpage
591
Lastpage
596
Abstract
This paper presents the simulator for air-spring type anti-vibration apparatuses, which are utilized for semiconductor exposure equipment. Rotational and translational motions of the apparatuses are simulated based on the dynamical model and the geometric alignment of sensors and actuators. The performance of the mode control implemented in the simulator is evaluated. Simulation results show advantages of this control method.
Keywords
geometry; motion control; pneumatic actuators; pneumatic control equipment; sensors; springs (mechanical); actuators; air-spring-type pneumatic antivibration apparatus simulator; dynamical model; geometric alignment; mode control; rotational motion simulation; semiconductor exposure equipment; sensors; six-degree-of-freedom; translational motion simulation; Actuators; Atmospheric modeling; Mathematical model; Sensitivity; Sensors; Simulation; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Mechatronic Systems (ICAMechS), 2012 International Conference on
Conference_Location
Tokyo
ISSN
1756-8412
Print_ISBN
978-1-4673-1962-1
Type
conf
Filename
6329648
Link To Document